"Prognostics of tool failing behavior based on autoassociative Gaussian ..."

Li Zhu, Junghui Chen, Chun-I Chen (2020)

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DOI: 10.1109/ICIT45562.2020.9067286

access: closed

type: Conference or Workshop Paper

metadata version: 2020-05-04

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Li Zhu, Junghui Chen, Chun-I Chen:
Prognostics of tool failing behavior based on autoassociative Gaussian process regression for semiconductor manufacturing. ICIT 2020: 316-321

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