"Modeling and Testing of a Novel Decoupled XY Nano-positioning Stage."

Fujun Wang et al. (2019)

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DOI: 10.1007/978-3-030-27532-7_25

access: closed

type: Conference or Workshop Paper

metadata version: 2019-08-02

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Fujun Wang, Xiaolu Zhao, Zhichen Huo, Yanling Tian, Yue Ma, Dawei Zhang:
Modeling and Testing of a Novel Decoupled XY Nano-positioning Stage. ICIRA (2) 2019: 277-284

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