"Design and Control of a Normal-Stressed Electromagnetic Actuated ..."

Xiangyuan Wang et al. (2021)

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DOI: 10.1007/978-3-030-89098-8_31

access: closed

type: Conference or Workshop Paper

metadata version: 2024-04-15

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Xiangyuan Wang, Linlin Li, Wei-Wei Huang, Li-Min Zhu:
Design and Control of a Normal-Stressed Electromagnetic Actuated Nano-positioning Stage. ICIRA (2) 2021: 324-334

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