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"ALD ZrO2 processes for BEoL device applications."
Wenke Weinreich et al. (2014)
- Wenke Weinreich, Konrad Seidel, Patrick Polakowski, Stefan Riedel, Lutz Wilde, Dina H. Triyoso, Mark G. Nolan:
ALD ZrO2 processes for BEoL device applications. ICICDT 2014: 1-4
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