"ALD Ta2O5 and Hf-doped Ta2O5 for BEOL compatible MIM."

D. H. Triyoso et al. (2014)

> Home

Details and statistics

DOI: 10.1109/ICICDT.2014.6838595

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/icicdt/TriyosoWSNPUODW14
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/icicdt/TriyosoWSNPUODW14
D. H. Triyoso, Wenke Weinreich, Konrad Seidel, Mark G. Nolan, Patrick Polakowski, D. Utess, Susanne Ohsiek, K. Dittmar, M. Weisheit, M. Licbau, R. Fox:
ALD Ta2O5 and Hf-doped Ta2O5 for BEOL compatible MIM. ICICDT 2014: 1-4

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.