"Impact of fin shape variability on device performance towards 10nm node."

Kazuyuki Tomida et al. (2015)

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DOI: 10.1109/ICICDT.2015.7165884

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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Kazuyuki Tomida, Keizo Hiraga, Morin Dehan, Geert Hellings, Doyoung Jang, Kenichi Miyaguchi, Thomas Chiarella, Minsoo Kim, Anda Mocuta, Naoto Horiguchi, Abdelkarim Mercha, Diederik Verkest, Aaron Thean:
Impact of fin shape variability on device performance towards 10nm node. ICICDT 2015: 1-4

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