"Characterization of high pressure hydrogen annealing effect on polysilicon ..."

Manh-Cuong Nguyen et al. (2016)

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DOI: 10.1109/ICICDT.2016.7542052

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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Manh-Cuong Nguyen, An Hoang-Thuy Nguyen, Jae-Won Choi, Soo-Yeun Han, Jung-Yeon Kim, Rino Choi, Changhwan Choi:
Characterization of high pressure hydrogen annealing effect on polysilicon channel field effect transistors using isothermal deep level trap spectroscopy. ICICDT 2016: 1-4

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