"Plasma-Enhanced Combustion-Processed Al2O3 Gate Oxide for In2O3 Thin Film ..."

Qihan Liu et al. (2019)

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DOI: 10.1109/ICICDT.2019.8790939

access: closed

type: Conference or Workshop Paper

metadata version: 2023-06-19

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Qihan Liu, Chun Zhao, Cezhou Zhao, Ivona Z. Mitrovic, Stephen Hall, Wangying Xu, Li Yang, Eng Gee Lim, Q. N. Wang, Y. L. Wei, Yixin Cao:
Plasma-Enhanced Combustion-Processed Al2O3 Gate Oxide for In2O3 Thin Film Transistors. ICICDT 2019: 1-5

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