"Plasma-induced photon irradiation damage on low-k dielectrics enhanced by ..."

Taro Ikeda et al. (2015)

> Home

Details and statistics

DOI: 10.1109/ICICDT.2015.7165901

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/icicdt/IkedaTYKEO15
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/icicdt/IkedaTYKEO15
Taro Ikeda, Akira Tanihara, Nobuhiko Yamamoto, Shigeru Kasai, Koji Eriguchi, Kouichi Ono:
Plasma-induced photon irradiation damage on low-k dielectrics enhanced by Cu-line layout. ICICDT 2015: 1-4

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.