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"Plasma-induced photon irradiation damage on low-k dielectrics enhanced by ..."

Taro Ikeda et al. (2015)

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DOI: 10.1109/ICICDT.2015.7165901

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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Taro Ikeda, Akira Tanihara, Nobuhiko Yamamoto, Shigeru Kasai, Koji Eriguchi, Kouichi Ono:
Plasma-induced photon irradiation damage on low-k dielectrics enhanced by Cu-line layout. ICICDT 2015: 1-4

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