"Design process interactions in shallow trench isolation chemical ..."

Conrad Guhl et al. (2021)

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DOI: 10.1109/ICICDT51558.2021.9626488

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type: Conference or Workshop Paper

metadata version: 2021-12-14

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Conrad Guhl, Sascha Bott, I. Can Albayrak, Anne Weitzmann, Robert Krause, Joscha Kappel, Birgit Reinhold, Nan Wu, Michael Zier, Andreas Schüring, Hongwei Ma, Rico Hüselitz, Benjamin Uhlig, Marcus Wislicenus:
Design process interactions in shallow trench isolation chemical mechanical planarization for layout diversification and design optimization. ICICDT 2021: 1-4

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