"A new aspect of plasma-induced physical damage in three-dimensional scaled ..."

Koji Eriguchi, Yoshinori Takao, Kouichi Ono (2014)

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DOI: 10.1109/ICICDT.2014.6838597

access: closed

type: Conference or Workshop Paper

metadata version: 2017-06-04

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Koji Eriguchi, Yoshinori Takao, Kouichi Ono:
A new aspect of plasma-induced physical damage in three-dimensional scaled structures - Sidewall damage by stochastic straggling and sputtering. ICICDT 2014: 1-5

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