"Plasma induced damage investigation in the fully depleted SOI technology."

M. Akbal et al. (2015)

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DOI: 10.1109/ICICDT.2015.7165900

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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M. Akbal, G. Ribes, M. Guillermet, L. Vallier:
Plasma induced damage investigation in the fully depleted SOI technology. ICICDT 2015: 1-4

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