"Research on Adaptive Control Algorithm of Nano Positioning Stage."

Jing Dai et al. (2015)

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DOI: 10.1007/978-3-662-47926-1_9

access: closed

type: Conference or Workshop Paper

metadata version: 2018-06-27

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Jing Dai, Tianqi Wang, Meng Shao, Peng Qu:
Research on Adaptive Control Algorithm of Nano Positioning Stage. ICHSA 2015: 77-82

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