"The Design of Kalman Filter for Nano-Positioning Stage."

Jing Dai et al. (2015)

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DOI: 10.1007/978-3-662-47926-1_8

access: closed

type: Conference or Workshop Paper

metadata version: 2018-06-27

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Jing Dai, Peng Qu, Meng Shao, Hui Zhang, Yongming Mao:
The Design of Kalman Filter for Nano-Positioning Stage. ICHSA 2015: 69-75

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