"Novel Honeycomb SOI Structure with Low Parasitic Capacitance for ..."

Tokuji Yokomatsu et al. (2012)

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DOI: 10.1109/ICETET.2012.21

access: closed

type: Conference or Workshop Paper

metadata version: 2020-10-25

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  - https://dblp.org/rec/conf/icetet/YokomatsuTMKFHM12
Tokuji Yokomatsu, Haruka Takeuchi, Yoshikazu Miyagawa, Kensuke Kanda, Takayuki Fujita, Kohei Higuchi, Kazusuke Maenaka:
Novel Honeycomb SOI Structure with Low Parasitic Capacitance for Human-Sensing Accelerometer. ICETET 2012: 70-74

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