"Fabrications of High-dielectric Plate Having Deep Trenches and its ..."

Masato Suzuki et al. (2012)

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DOI: 10.1109/ICETET.2012.17

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-23

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Masato Suzuki, Tomokazu Takahashi, J. Onishi, T. Wada, Seiji Aoyagi, T. Nishida, Y. Yoshikawa:
Fabrications of High-dielectric Plate Having Deep Trenches and its Application to Electrostatic Generator for Vibration Energy Harvesting. ICETET 2012: 52-56

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