"MEMS Mirror Controlling System with Holed-PSD."

Takayuki Fujita, Yoshiharu Nagatani, Kazusuke Maenaka (2010)

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DOI: 10.1109/ICETET.2010.101

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Takayuki Fujita, Yoshiharu Nagatani, Kazusuke Maenaka:
MEMS Mirror Controlling System with Holed-PSD. ICETET 2010: 446-449

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