"Oxygen concentration effect on properties of SiOC thin films obtained by ..."

Juan Ramon Ramos, Crisóforo Morales, Yasuhiro Matsumoto (2017)

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DOI: 10.1109/ICEEE.2017.8108846

access: closed

type: Conference or Workshop Paper

metadata version: 2022-01-26

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Juan Ramon Ramos, Crisóforo Morales, Yasuhiro Matsumoto:
Oxygen concentration effect on properties of SiOC thin films obtained by HWCVD. CCE 2017: 1-4

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