"Luminescent Silicon Oxycarbide Thin Films via Hot-wire CVD using ..."

J. R. Ramos-Serrano, Yasuhiro Matsumoto, Crisóforo Morales (2018)

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DOI: 10.1109/ICEEE.2018.8533970

access: closed

type: Conference or Workshop Paper

metadata version: 2022-01-26

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J. R. Ramos-Serrano, Yasuhiro Matsumoto, Crisóforo Morales:
Luminescent Silicon Oxycarbide Thin Films via Hot-wire CVD using Tetraethyl Orthosilicate: Role of the Chamber Pressure and Post-deposition Annealing. CCE 2018: 1-4

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