"Micromotors unit based on CMOS-MEMS technology integrated on a single chip."

Andrea López-Tapia et al. (2021)

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DOI: 10.1109/CCE53527.2021.9633117

access: closed

type: Conference or Workshop Paper

metadata version: 2022-01-03

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Andrea López-Tapia, Luis Sánchez-Márquez, Mario Alfredo Reyes-Barranca, Griselda Stephany Abarca-Jimenez, Luis Martín Flores-Nava:
Micromotors unit based on CMOS-MEMS technology integrated on a single chip. CCE 2021: 1-6

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