"Improvement of the architecture for MEMS resonator quality factor measurement."

Ming Zhang, Nicolas Llaser, Hervé Mathias (2008)

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DOI: 10.1109/ICECS.2008.4674839

access: closed

type: Conference or Workshop Paper

metadata version: 2018-09-04

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Ming Zhang, Nicolas Llaser, Hervé Mathias:
Improvement of the architecture for MEMS resonator quality factor measurement. ICECS 2008: 255-258

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