"High resolution NEMS smart audio sensor based on resistive silicon nano ..."

Eric Savary et al. (2014)

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DOI: 10.1109/ICECS.2014.7050046

access: closed

type: Conference or Workshop Paper

metadata version: 2022-04-09

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Eric Savary, Wenceslas Rahajandraibe, Stéphane Meillére, Edith Kussener, Hervé Barthélemy, Jaroslaw Czarny, Hélène Lhermet, P. Robert:
High resolution NEMS smart audio sensor based on resistive silicon nano wires for hearing aids. ICECS 2014: 558-561

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