"Multilevel beam SOI-MEMS fabrication and applications."

Veljko Milanovic (2002)

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DOI: 10.1109/ICECS.2002.1045389

access: closed

type: Conference or Workshop Paper

metadata version: 2021-01-15

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Veljko Milanovic:
Multilevel beam SOI-MEMS fabrication and applications. ICECS 2002: 281-285

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