"A novel design and fabrication method of a pyramidal shape chip for ..."

Omer Cohen, Avshalom Shai, Yael Nemirovsky (2004)

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DOI: 10.1109/ICECS.2004.1399720

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-23

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Omer Cohen, Avshalom Shai, Yael Nemirovsky:
A novel design and fabrication method of a pyramidal shape chip for scanning micro mirror. ICECS 2004: 471-474

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