"Noise Suppression and Disturbance Rejection Control for Piezo-Actuated ..."

Xinyu Wang et al. (2023)

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DOI: 10.1109/ICCMA59762.2023.10374766

access: closed

type: Conference or Workshop Paper

metadata version: 2024-01-16

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Xinyu Wang, Jianying Zheng, Dongyu Li, Fei Dong, Jianpeng Zhong, Qinglei Hu:
Noise Suppression and Disturbance Rejection Control for Piezo-Actuated Nanopositioning Stages. ICCMA 2023: 439-444

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