"Improved rotation angle of a MEMS analog torsional micro-mirror with ..."

Saeid Afrang, Malek Hassanzadeh, Ghader Rezazadeh (2016)

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DOI: 10.1145/3029610.3029613

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-24

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Saeid Afrang, Malek Hassanzadeh, Ghader Rezazadeh:
Improved rotation angle of a MEMS analog torsional micro-mirror with auxiliary fixed-free beams. ICCMA 2016: 154-157

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