"Post-Layout Perturbation towards Stitch Friendly Layout for Multiple ..."

Sudipta Paul, Pritha Banerjee, Susmita Sur-Kolay (2017)

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DOI: 10.1109/ICCD.2017.71

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-02

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Sudipta Paul, Pritha Banerjee, Susmita Sur-Kolay:
Post-Layout Perturbation towards Stitch Friendly Layout for Multiple E-Beam Lithography. ICCD 2017: 411-414

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