"High Frequency Capacitive RF MEMS Switch Using Dielectric Silicon Nitride ..."

Trigunesh Narzary, Rajagopal Kumar (2022)

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DOI: 10.1109/ICCCNT54827.2022.9984632

access: closed

type: Conference or Workshop Paper

metadata version: 2024-04-08

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Trigunesh Narzary, Rajagopal Kumar:
High Frequency Capacitive RF MEMS Switch Using Dielectric Silicon Nitride for Wireless Telecommunication and 5G Applications. ICCCNT 2022: 1-7

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