"Interval-valued statistical modeling of oxide chemical-mechanical polishing."

James D. Ma et al. (2005)

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DOI: 10.1109/ICCAD.2005.1560054

access: closed

type: Conference or Workshop Paper

metadata version: 2024-03-21

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James D. Ma, Claire Fang Fang, Rob A. Rutenbar, Xiaolin Xie, Duane S. Boning:
Interval-valued statistical modeling of oxide chemical-mechanical polishing. ICCAD 2005: 141-148

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