"Symbiotic Simulation Control in Semiconductor Manufacturing."

Heiko Aydt et al. (2008)

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DOI: 10.1007/978-3-540-69389-5_5

access: open

type: Conference or Workshop Paper

metadata version: 2024-05-07

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Heiko Aydt, Stephen John Turner, Wentong Cai, Malcolm Yoke Hean Low, Peter Lendermann, Boon-Ping Gan:
Symbiotic Simulation Control in Semiconductor Manufacturing. ICCS (3) 2008: 26-35

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