"A dynamic sampling methodology for plasma etch processes using Gaussian ..."

Jian Wan, Bahman Honari, Seán F. McLoone (2013)

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DOI: 10.1109/ICAT.2013.6684080

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Jian Wan, Bahman Honari, Seán F. McLoone:
A dynamic sampling methodology for plasma etch processes using Gaussian process regression. ICAT 2013: 1-6

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