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"Design and analysis of an in-plane flexure XYZ micro/nano-positioning stage."

Xiaozhi Zhang, Qingsong Xu (2016)

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DOI: 10.1109/ICARM.2016.7606946

access: closed

type: Conference or Workshop Paper

metadata version: 2019-10-19

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Xiaozhi Zhang, Qingsong Xu:
Design and analysis of an in-plane flexure XYZ micro/nano-positioning stage. ICARM 2016: 359-363

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