"Design and optimization of a compact XY parallel micro/nano-positioning ..."

Zeyi Wu, Qingsong Xu (2017)

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DOI: 10.1109/ICARM.2017.8273223

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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Zeyi Wu, Qingsong Xu:
Design and optimization of a compact XY parallel micro/nano-positioning stage with stacked structure. ICARM 2017: 558-563

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