"Modeling with hierarchical Petri net of semiconductor manufacturing system."

Huang Dan, Yan Juanwei, Qiao Fei (2004)

> Home

Details and statistics

DOI: 10.1109/ICARCV.2004.1469775

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-23

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/icarcv/DanJF04
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/icarcv/DanJF04
Huang Dan, Yan Juanwei, Qiao Fei:
Modeling with hierarchical Petri net of semiconductor manufacturing system. ICARCV 2004: 2217-2222

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.