"Silicon-Nitride Temperature Sensor with Enhanced Sensitivity Based on ..."

Zihao Tang et al. (2024)

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DOI: 10.1109/ICAIT62580.2024.10808074

access: closed

type: Conference or Workshop Paper

metadata version: 2025-02-26

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Zihao Tang, Minming Zhang, Shuang Zheng, Deming Liu:
Silicon-Nitride Temperature Sensor with Enhanced Sensitivity Based on Mach-Zehnder Interferometer. ICAIT 2024: 366-369

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