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"Optimization of a Short-Range Proximity Effect Correction Algorithm in ..."

Max Schneider et al. (2012)

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DOI: 10.1007/978-3-642-33078-0_4

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-26

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  dblp key:
  - conf/ica3pp/SchneiderBSHF12
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  - https://dblp.org/rec/conf/ica3pp/SchneiderBSHF12
Max Schneider, Nikola Belic, Christoph Sambale, Ulrich Hofmann, Dietmar Fey:
Optimization of a Short-Range Proximity Effect Correction Algorithm in E-Beam Lithography Using GPGPUs. ICA3PP (1) 2012: 41-55

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