"Development of electrostatic precipitator and wet scrubber integration ..."

Jin-Ho Sung et al. (2019)

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DOI: 10.1109/IAS.2019.8912406

access: closed

type: Conference or Workshop Paper

metadata version: 2019-12-05

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Jin-Ho Sung, San Kim, Bangwoo Han, Yong-Jin Kim, Kee-Jung Hong, Hak-Joon Kim:
Development of electrostatic precipitator and wet scrubber integration technology for controlling NOx and particulate matter emission from semiconductor manufacturing process. IAS 2019: 1-7

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