"Development of Planar Microcoils for an Electromagnetic Linear Actuator ..."

Sebastiano Merzaghi, Pascal Meyer, Yves Perriard (2008)

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DOI: 10.1109/08IAS.2008.79

access: closed

type: Conference or Workshop Paper

metadata version: 2021-07-06

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Sebastiano Merzaghi, Pascal Meyer, Yves Perriard:
Development of Planar Microcoils for an Electromagnetic Linear Actuator Fabricated in Batch-Type Wafer Technology. IAS 2008: 1-6

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