"Micromachined probes with integrated GaAs Schottky diodes for on-wafer ..."

Linli Xie et al. (2018)

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DOI: 10.1109/I2MTC.2018.8409690

access: closed

type: Conference or Workshop Paper

metadata version: 2019-10-19

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Linli Xie, Christopher M. Moore, Michael E. Cyberey, Souheil Nadri, Noah D. Sauber, Matthew F. Bauwens, Arthur W. Lichtenberger, N. Scott Barker, Robert M. Weikle:
Micromachined probes with integrated GaAs Schottky diodes for on-wafer temperature sensing. I2MTC 2018: 1-6

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