"Thin-film Thickness Absolute Measurement by Differential Optic-fiber White ..."

Xu Lu et al. (2019)

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DOI: 10.1109/I2MTC.2019.8826878

access: closed

type: Conference or Workshop Paper

metadata version: 2020-05-06

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Xu Lu, Zhangjun Yu, Jun Yang, Yonggui Yuan, Hanyang Li, Libo Yuan:
Thin-film Thickness Absolute Measurement by Differential Optic-fiber White Light Interferometry. I2MTC 2019: 1-5

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