"Etching-Based Measurement Error Compensation for Eddy Current Displacement ..."

Kalle Kinnunen, Raine Viitala (2024)

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DOI: 10.1109/I2MTC60896.2024.10561096

access: closed

type: Conference or Workshop Paper

metadata version: 2024-07-23

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Kalle Kinnunen, Raine Viitala:
Etching-Based Measurement Error Compensation for Eddy Current Displacement Measurement. I2MTC 2024: 1-6

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