"Platinum growth analysis in atomic layer deposition using in-situ ..."

Wen-Hao Cho et al. (2016)

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DOI: 10.1109/I2MTC.2016.7520534

access: closed

type: Conference or Workshop Paper

metadata version: 2019-09-30

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Wen-Hao Cho, Chi-Chung Kei, Bo-Heng Liu, Yo-Shane Yu, Fong-Zhi Chen:
Platinum growth analysis in atomic layer deposition using in-situ resistance measurement. I2MTC 2016: 1-4

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