"A mask double patterning technique using litho simulation by wavelet ..."

Rance Rodrigues, Sandip Kundu (2010)

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DOI: 10.1145/1785481.1785506

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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Rance Rodrigues, Sandip Kundu:
A mask double patterning technique using litho simulation by wavelet transform. ACM Great Lakes Symposium on VLSI 2010: 103-106

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