"Micromachined probes for on-wafer measurement of millimeter- and ..."

Robert M. Weikle et al. (2013)

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DOI: 10.1109/GLOBALSIP.2013.6736989

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-23

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Robert M. Weikle, N. Scott Barker, Arthur W. Lichtenberger, Matthew F. Bauwens:
Micromachined probes for on-wafer measurement of millimeter- and submillimeter-wave devices and components. GlobalSIP 2013: 707-710

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