"A Kind of Multi-disciplinary Simulation and Design Platform for IC Chamber ..."

Xiaojing Wu et al. (2014)

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DOI: —

access: open

type: Conference or Workshop Paper

metadata version: 2024-10-14

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Xiaojing Wu, Jia Cheng, Linhong Ji, Yuemin Hou, Yijia Lu:
A Kind of Multi-disciplinary Simulation and Design Platform for IC Chamber based on Commercial Solver. GI-Jahrestagung 2014: 2049-2054

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