"Relationship between the Binding Energy and Boundary Condition in SiOC ..."

Teresa Oh, Chy Hyung Kim, Chi Sup Jung (2011)

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DOI: 10.1007/978-3-642-27180-9_26

access: closed

type: Conference or Workshop Paper

metadata version: 2017-06-15

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Teresa Oh, Chy Hyung Kim, Chi Sup Jung:
Relationship between the Binding Energy and Boundary Condition in SiOC Film for ILD Application. FGIT-GDC 2011: 213-218

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