"In-Plane SOI MEMS as a Mechanical Material for Time and Frequency Studies ..."

Yoshio Mita, Eric Lebrasseur, Akio Higo (2018)

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DOI: 10.1109/EWME.2018.8629393

access: closed

type: Conference or Workshop Paper

metadata version: 2019-02-09

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Yoshio Mita, Eric Lebrasseur, Akio Higo:
In-Plane SOI MEMS as a Mechanical Material for Time and Frequency Studies on Vibration. EWME 2018: 101-105

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