"PWS: Potential Wafermap Scratch Defect Pattern Recognition with Machine ..."

Katherine Shu-Min Li et al. (2020)

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DOI: 10.1109/ETS48528.2020.9131598

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Katherine Shu-Min Li, Peter Yi-Yu Liao, Leon Chou, Ken Chau-Cheung Cheng, Andrew Yi-Ann Huang, Sying-Jyan Wang, Gus Chang-Hung Han:
PWS: Potential Wafermap Scratch Defect Pattern Recognition with Machine Learning Techniques. ETS 2020: 1-6

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