"A Virtual Metrology system for predicting CVD thickness with equipment ..."

Gian Antonio Susto, Alessandro Beghi, Cristina De Luca (2011)

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DOI: 10.1109/ETFA.2011.6059209

access: closed

type: Conference or Workshop Paper

metadata version: 2017-06-02

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Gian Antonio Susto, Alessandro Beghi, Cristina De Luca:
A Virtual Metrology system for predicting CVD thickness with equipment variables and qualitative clustering. ETFA 2011: 1-4

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