"A Novel Visual Fault Detection and Classification System for Semiconductor ..."

Tobias Schlosser et al. (2019)

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DOI: 10.1109/ETFA.2019.8869311

access: closed

type: Conference or Workshop Paper

metadata version: 2023-06-26

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Tobias Schlosser, Frederik Beuth, Michael Friedrich, Danny Kowerko:
A Novel Visual Fault Detection and Classification System for Semiconductor Manufacturing Using Stacked Hybrid Convolutional Neural Networks. ETFA 2019: 1511-1514

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